Semiconductor laser
IWANO HIDEAKI
1988-04-04
著作权人SEIKO EPSON CORP
专利号JP1988073581A
国家日本
文献子类发明申请
其他题名Semiconductor laser
英文摘要PURPOSE:To obtain a semiconductor laser, which has small oscillation threshold current density, generates single transverse mode oscillation and can be manufactured with excellent yield in a uniform large area, by specifying a buried semiconductor layer from the periodic table and changing the semiconductor layer into a semi-insulating compound semiconductor layer. CONSTITUTION:When a II-VI compound semiconductor layer 103 consists of ZnSl, it has index difference extremely larger than the refractive index of an active layer 109 composed of GaAs, etc., and the efficiency of optical confinement is improved, thus lowering injection current density. Since a II-VI compound semiconductor has an extremely large band gap, the resistivity of a thin-film through an MOCVD method is increased, and the buried layer 103 can prevent inJection currents completely. Consequently, threshold current density can further be lowered. The active layer 109 is inverted-mesa-etched in a striped manner, and the buried layer 103 is shaped, thus acquiring a flat surface. The width of the actual active layer 109 is made narrower than that of a resist pattern in a photolithographic process, thus resulting in a single oscillation transverse mode, then allowing stable laser operation.
公开日期1988-04-04
申请日期1986-09-16
状态失效
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/87377]  
专题半导体激光器专利数据库
作者单位SEIKO EPSON CORP
推荐引用方式
GB/T 7714
IWANO HIDEAKI. Semiconductor laser. JP1988073581A. 1988-04-04.
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