Optical integrated element | |
MURATA SHIGERU; KATOU YOSHITAKE | |
1988-12-15 | |
著作权人 | NEC CORP |
专利号 | JP1988307794A |
国家 | 日本 |
文献子类 | 发明申请 |
其他题名 | Optical integrated element |
英文摘要 | PURPOSE:To obtain an optical integrated element, which is electrically isolated sufficiently, has a flat surface and can be worked finely, by removing an active layer and a clad layer in a coupling section between a distributed feedback type laser and an optical element and burying a high resistance semiconductor transparent to the oscillation wavelength of the distributed feedback type laser. CONSTITUTION:A distributed feedback type laser 110 having laminated structure including at least an optical guide layer 102 with a diffraction grating 150, an active layer 104 and a clad layer 105 and an optical element 130 are integrated onto one semiconductor substrate 10 The active layer 104 and the clad layer 105 in laminated structure are removed in a coupling section 120 between the distributed feedback type laser 110 and the optical element 130, and a removed region is buried with a high resistance semiconductor 107 transparent to the oscillation wavelength of the distributed feedback type laser 110. Accordingly, an optical integrated element, which is electrically isolated sufficiently largely and can be worked finely as ridge guide structure, is acquired. |
公开日期 | 1988-12-15 |
申请日期 | 1987-06-09 |
状态 | 失效 |
内容类型 | 专利 |
源URL | [http://ir.opt.ac.cn/handle/181661/87365] |
专题 | 半导体激光器专利数据库 |
作者单位 | NEC CORP |
推荐引用方式 GB/T 7714 | MURATA SHIGERU,KATOU YOSHITAKE. Optical integrated element. JP1988307794A. 1988-12-15. |
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