Optical integrated element
MURATA SHIGERU; KATOU YOSHITAKE
1988-12-15
著作权人NEC CORP
专利号JP1988307794A
国家日本
文献子类发明申请
其他题名Optical integrated element
英文摘要PURPOSE:To obtain an optical integrated element, which is electrically isolated sufficiently, has a flat surface and can be worked finely, by removing an active layer and a clad layer in a coupling section between a distributed feedback type laser and an optical element and burying a high resistance semiconductor transparent to the oscillation wavelength of the distributed feedback type laser. CONSTITUTION:A distributed feedback type laser 110 having laminated structure including at least an optical guide layer 102 with a diffraction grating 150, an active layer 104 and a clad layer 105 and an optical element 130 are integrated onto one semiconductor substrate 10 The active layer 104 and the clad layer 105 in laminated structure are removed in a coupling section 120 between the distributed feedback type laser 110 and the optical element 130, and a removed region is buried with a high resistance semiconductor 107 transparent to the oscillation wavelength of the distributed feedback type laser 110. Accordingly, an optical integrated element, which is electrically isolated sufficiently largely and can be worked finely as ridge guide structure, is acquired.
公开日期1988-12-15
申请日期1987-06-09
状态失效
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/87365]  
专题半导体激光器专利数据库
作者单位NEC CORP
推荐引用方式
GB/T 7714
MURATA SHIGERU,KATOU YOSHITAKE. Optical integrated element. JP1988307794A. 1988-12-15.
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