| The Fabrication of Micro/Nano Structures by Laser Machining | |
| Liangliang Yang; Jiangtao Wei ; Zhe Ma ; Peishuai Song; Jing Ma ; Yongqiang Zhao; Zhen Huang ; Mingliang Zhang ; Fuhua Yang ; Xiaodong Wang | |
| 刊名 | Nanomaterials
 |
| 2019 | |
| 卷号 | 9页码:1789 |
| 内容类型 | 期刊论文 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/29846]  |
| 专题 | 半导体研究所_半导体集成技术工程研究中心 |
| 推荐引用方式 GB/T 7714 | Liangliang Yang; Jiangtao Wei ; Zhe Ma ; Peishuai Song; Jing Ma ; Yongqiang Zhao; Zhen Huang ; Mingliang Zhang ; Fuhua Yang ; Xiaodong Wang. The Fabrication of Micro/Nano Structures by Laser Machining[J]. Nanomaterials,2019,9:1789. |
| APA | Liangliang Yang; Jiangtao Wei ; Zhe Ma ; Peishuai Song; Jing Ma ; Yongqiang Zhao; Zhen Huang ; Mingliang Zhang ; Fuhua Yang ; Xiaodong Wang.(2019).The Fabrication of Micro/Nano Structures by Laser Machining.Nanomaterials,9,1789. |
| MLA | Liangliang Yang; Jiangtao Wei ; Zhe Ma ; Peishuai Song; Jing Ma ; Yongqiang Zhao; Zhen Huang ; Mingliang Zhang ; Fuhua Yang ; Xiaodong Wang."The Fabrication of Micro/Nano Structures by Laser Machining".Nanomaterials 9(2019):1789. |
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