Optimization on benzocyclobutene-based CMUT fabrication with an inverse structure

	Optimization on benzocyclobutene-based CMUT fabrication with an inverse structure
	Li, Zhenhao; Na, Shuai; Chen, Albert I. H.; Wong, Lawrence L. P.; Sun, Zhendong; Liu, Ping; Yeow, John T. W.
刊名	SENSORS AND ACTUATORS A-PHYSICAL
	2018
卷号	281 页码:1
内容类型	期刊论文
源URL	[http://ir.amss.ac.cn/handle/2S8OKBNM/33565]
专题	中国科学院数学与系统科学研究院
推荐引用方式 GB/T 7714	Li, Zhenhao,Na, Shuai,Chen, Albert I. H.,et al. Optimization on benzocyclobutene-based CMUT fabrication with an inverse structure[J]. SENSORS AND ACTUATORS A-PHYSICAL,2018,281:1.
APA	Li, Zhenhao.,Na, Shuai.,Chen, Albert I. H..,Wong, Lawrence L. P..,Sun, Zhendong.,...&Yeow, John T. W..(2018).Optimization on benzocyclobutene-based CMUT fabrication with an inverse structure.SENSORS AND ACTUATORS A-PHYSICAL,281,1.
MLA	Li, Zhenhao,et al."Optimization on benzocyclobutene-based CMUT fabrication with an inverse structure".SENSORS AND ACTUATORS A-PHYSICAL 281(2018):1.