Development of relative angle determinable stitching interferometry for high accuracy X-ray focusing mirrors

doi:10.1117/12.2273793

CORC > 上海应用物理研究所 > 中国科学院上海应用物理研究所 > 中科院上海应用物理研究所2011-2017年

	Development of relative angle determinable stitching interferometry for high accuracy X-ray focusing mirrors
	Shi, YN ; Xu, XD ; Huang, QS ; Wang, H ; Li, AG ; Zhang, L ; Wang, ZS
	2017
会议日期	AUG 06-07, 2017
会议地点	San Diego, CA
关键词	COMPOUND REFRACTIVE LENSES DIFFRACTION
期号	—
DOI	10.1117/12.2273793
英文摘要	X-ray focusing mirrors with elliptical shape are widely used in synchrotron facilities for micro-, nano-scale focusing experiments. Surface interferometry plays an important role in the x-ray mirrors figuring with subnanometer accuracy. To avoid the second order error in stitching interferometry, relative angle determinable stitching interferometry (RADSI) is under development. This method was first developed by Yamauchi et al from Osaka University, which uses a planar mirror to correct the relative stitching angle between the neighboring subapertures. Here, we use RADSI to measure the x-ray spherical and elliptical mirrors with 300mm aperture Fizeau interferometer. The interferometer is combined with 4 accurate rotation and tilt stages for the stitching measurement. To ensure the stitching accuracy, we first studied the measurement accuracy within every single subaperture. Multiple measurement is used to decease the random error of single subaperture. The subaperture positioning is also carefully corrected to ensure the pixels of the adjacent subapertures in overlapping areas can be matched well. A first stitching measurement result of a spherical mirror with 30 meters radius is shown.
会议录	ADVANCES IN METROLOGY FOR X-RAY AND EUV OPTICS VII
文献子类	会议论文
语种	英语
ISSN号	0277-786X
ISBN号	978-1-5106-1228-0; 978-1-5106-1227-3
内容类型	会议论文
源URL	[http://ir.sinap.ac.cn/handle/331007/31925]
专题	上海应用物理研究所_中科院上海应用物理研究所2011-2017年
作者单位	1.Tongji Univ, Sch Phys Sci & Engn, Inst Precis Opt Engn, Minist Educ,Key Lab Adv Microstruct Mat, Shanghai 200092, Peoples R China 2.Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai Synchrotron Radiat Facil, Zhangheng Rd 239, Shanghai 201204, Peoples R China
推荐引用方式 GB/T 7714	Shi, YN,Xu, XD,Huang, QS,et al. Development of relative angle determinable stitching interferometry for high accuracy X-ray focusing mirrors[C]. 见:. San Diego, CA. AUG 06-07, 2017.