Gas Breakdown and Discharge Formation in High-Power Impulse Magnetron Sputtering

	Gas Breakdown and Discharge Formation in High-Power Impulse Magnetron Sputtering
	Zuo, Xiao ; Chen, Rende ; Ke, Peiling ; Wang, Aiying
刊名	IEEE TRANSACTIONS ON PLASMA SCIENCE
	2019
卷号	47 期号:2 页码:1215-1222
关键词	HIPIMS COATINGS DEPOSITION FILMS MICROSTRUCTURE
DOI	10.1109/TPS.2018.2889696
英文摘要	Gas Breakdown and Discharge Formation in High-Power Impulse Magnetron Sputtering
内容类型	期刊论文
源URL	[http://ir.nimte.ac.cn/handle/174433/18591]
专题	2019专题
作者单位	1.Ke, PL 2.Wang, AY (reprint author), Chinese Acad Sci, Key Lab Marine Mat & Related Technol, Zhejiang Key Lab Marine Mat & Protect Technol, Ningbo Inst Mat Technol & Engn, Ningbo 315201, Zhejiang, Peoples R China.
推荐引用方式 GB/T 7714	Zuo, Xiao,Chen, Rende,Ke, Peiling,et al. Gas Breakdown and Discharge Formation in High-Power Impulse Magnetron Sputtering[J]. IEEE TRANSACTIONS ON PLASMA SCIENCE,2019,47(2):1215-1222.
APA	Zuo, Xiao,Chen, Rende,Ke, Peiling,&Wang, Aiying.(2019).Gas Breakdown and Discharge Formation in High-Power Impulse Magnetron Sputtering.IEEE TRANSACTIONS ON PLASMA SCIENCE,47(2),1215-1222.
MLA	Zuo, Xiao,et al."Gas Breakdown and Discharge Formation in High-Power Impulse Magnetron Sputtering".IEEE TRANSACTIONS ON PLASMA SCIENCE 47.2(2019):1215-1222.