Movement of luminous group spots on target and size modification of micro particles during cathodic vacuum arc deposition

	Movement of luminous group spots on target and size modification of micro particles during cathodic vacuum arc deposition
	Zuo, Xiao; Chen, Rende; Zhang, Dong; Ke, Peiling; Wang, Aiying
刊名	VACUUM
	2019
卷号	164 页码:381-389
DOI	10.1016/j.vacuum.2019.03.048
英文摘要	Movement of luminous group spots on target and size modification of micro particles during cathodic vacuum arc deposition
内容类型	期刊论文
源URL	[http://ir.nimte.ac.cn/handle/174433/18268]
专题	2019专题
作者单位	Wang, AY (reprint author), Chinese Acad Sci, Key Lab Marine Mat & Related Technol, Zhejiang Key Lab Marine Mat & Protect Technol, Ningbo Inst Mat Technol & Engn, Ningbo 315201, Zhejiang, Peoples R China.
推荐引用方式 GB/T 7714	Zuo, Xiao,Chen, Rende,Zhang, Dong,et al. Movement of luminous group spots on target and size modification of micro particles during cathodic vacuum arc deposition[J]. VACUUM,2019,164:381-389.
APA	Zuo, Xiao,Chen, Rende,Zhang, Dong,Ke, Peiling,&Wang, Aiying.(2019).Movement of luminous group spots on target and size modification of micro particles during cathodic vacuum arc deposition.VACUUM,164,381-389.
MLA	Zuo, Xiao,et al."Movement of luminous group spots on target and size modification of micro particles during cathodic vacuum arc deposition".VACUUM 164(2019):381-389.