Distributed feedback type semiconductor laser
KITAMURA MITSUHIRO
1984-09-18
著作权人NIPPON DENKI KK
专利号JP1984165478A
国家日本
文献子类发明申请
其他题名Distributed feedback type semiconductor laser
英文摘要PURPOSE:To sufficiently reduce a thermal deterioration and meltback due to a diffraction grating by forming a current block layer on the overall surface except the vicinity of a mesa stripe, and covering the periphery of an active layer with a semiconductor layer having large energy gap and small refractive index. CONSTITUTION:A hetero structure semiconductor wafer is mesa etched to form a mesa stripe 4. Subsequently, the second crystal growth for forming BH is executed. First, a non-doped In0.59Ga0.41As0.90P0.10 active layer 5 corresponding to 55mum of light emitting wavelength, and a P type In0.72Ga0.28As0.61P0.39 meltback preventing layer 6 corresponding to 3mum of light emitting wavelength are all laminated sequentially on the overall surface except the side faces of the stripe 4. Then, a P type InP clad layer 7 is grown over the entire surface to cover the mesa, and an N type InP current block layer 8 is grown over a P type InP buried layer 9 and a P type In0.85Ga0.15As0.33P0.67 electrode layer 10 corresponding to 1mum of emitting light wavelength on the overall surface. This second LPE growth is executed by setting 650 deg.C of source temperature and 630 deg.C of growing temperature of the active layer.
公开日期1984-09-18
申请日期1983-03-10
状态失效
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/74687]  
专题半导体激光器专利数据库
作者单位NIPPON DENKI KK
推荐引用方式
GB/T 7714
KITAMURA MITSUHIRO. Distributed feedback type semiconductor laser. JP1984165478A. 1984-09-18.
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