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	光ピックアップ装置
	浜田 健; 清水 裕一
	1996-12-05
著作权人	松下電器産業株式会社
专利号	JP2586578B2
国家	日本
文献子类	授权发明
其他题名	光ピックアップ装置
英文摘要	PURPOSE:To control the position of respective components by integrating monolithicly a semiconductor laser, a detector, a hologram element and a lens on the same chip. CONSTITUTION:Etching is executed to a wafer, three parts of a laser part 9, a detector part 9 and a reflecting part 11 are formed, both active layers (A) and (B) remain at a detector part 10 and an active layer (A) of a lower part only remains by the laser part 9. The side surface of the laser part 9 and the detector part 10 becomes vertical, the reflecting part 11 has the inclina tion of 45 deg. and as such, the etching is executed. At the side surface of the reflecting part, a lattice-shaped metallic film is thickly formed, a reflecting type hologram optical element 13 is obtained, SiO212 is thickly formed only the wafer, a Fresnel collimator lens 14 is formed on the surface and a monolith ic hologram optical pickup is obtained. Thus, with the technology of the lithogra phy, the position of respective optical parts can be controlled with a sufficient high accuracy.
公开日期	1997-03-05
申请日期	1988-05-31
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/68994]
专题	半导体激光器专利数据库
作者单位	松下電器産業株式会社
推荐引用方式 GB/T 7714	浜田 健,清水 裕一. 光ピックアップ装置. JP2586578B2. 1996-12-05.

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