Manufacture of 3-dimensional quantum well semiconductor laser
YANASE TOMOO; NISHI KENICHI; KATOU YOSHITAKE; YAMAGUCHI MASAYUKI
1985-12-11
著作权人NIPPON DENKI KK
专利号JP1985250684A
国家日本
文献子类发明申请
其他题名Manufacture of 3-dimensional quantum well semiconductor laser
英文摘要PURPOSE:To reduce the temperature dependency of an oscillating threshold value by forming the ultrafine region of the size that a quantum well effect is presented by partly etching a semiconductor layer, burying it therein, and forming an active region having a 3-dimensional quantum well structure. CONSTITUTION:An N type InP is grown as an N type clad layer 12 on an N type InP single crystal substrate 13, and further InXGa1-XAsYP1-Y of narrow energy gap from the InP is epitaxially grown as an active region 1 Then, only round regions 21 aligned are masked, and the region 22 except the region 21 is amplified. A P type InP layer is epitaxially grown as a P type clad layer 34 on the ultrafine projection formed in this manner, and thus the region 31 exhibits the quantum effect. Further, the region 31 is used as a buried striped structure of current implanting region. The 3-dimensional quantum well laser manufactures according to this method exhibits remarkably quantum well effect and accordingly remarkably reduces the temperature dependency of the oscillating threshold current.
公开日期1985-12-11
申请日期1984-05-25
状态失效
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/65831]  
专题半导体激光器专利数据库
作者单位NIPPON DENKI KK
推荐引用方式
GB/T 7714
YANASE TOMOO,NISHI KENICHI,KATOU YOSHITAKE,et al. Manufacture of 3-dimensional quantum well semiconductor laser. JP1985250684A. 1985-12-11.
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