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	A small aperture semitransparent optical detector including edge passivation and method of making
	MA, EUGENE Y.; PAYNE, ADAM M.; WAGNER, MATTHIAS
	2001-10-08
著作权人	AEGIS SEMICONDUCTOR
专利号	AU2001250907A1
国家	澳大利亚
文献子类	发明申请
其他题名	A small aperture semitransparent optical detector including edge passivation and method of making
英文摘要	Materials suitable for fabricating optical monitors include amorphous, polycrystalline and microcrystalline materials. Semitransparent photodetector materials may be based on silicon or silicon and germanium alloys. Conductors for connecting to and contacting the photodetector may be made from various transparent oxides, including zinc oxide, tin oxide and indium tin oxide. Optical monitor structures based on PIN diodes take advantage of the materials disclosed. Various contact, lineout, substrate and interconnect structures optimize the monitors for integration with various light sources, including vertical cavity surface emitting laser (VCSEL) arrays. Complete integrated structures include a light source, optical monitor and either a package or waveguide into which light is directed.
公开日期	2001-10-08
申请日期	2001-03-20
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/65553]
专题	半导体激光器专利数据库
作者单位	AEGIS SEMICONDUCTOR
推荐引用方式 GB/T 7714	MA, EUGENE Y.,PAYNE, ADAM M.,WAGNER, MATTHIAS. A small aperture semitransparent optical detector including edge passivation and method of making. AU2001250907A1. 2001-10-08.

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