| Laser beam analysis apparatus | |
| SCAGGS MICHAEL J. | |
| 2015-12-25 | |
| 著作权人 | HAAS LASER TECHNOLOGIES INC. |
| 专利号 | IN9267CHENP2012A |
| 国家 | 印度 |
| 文献子类 | 发明申请 |
| 其他题名 | Laser beam analysis apparatus |
| 英文摘要 | An apparatus that enables real time measurement of the spatial profile circularity centroid astigmatism and M2 values of a laser beam generated by a high power laser beam. The apparatus employs the optics used in a process application including a focus lens and cover glass. An attenuation module includes a pair of high reflecting mirror plates disposed in parallel spaced apart relation to one another at a common angle of incidence to the laser beam. A beam dump is positioned out of a path of travel of the laser beam and in receiving relation to light reflected by the first and second mirrors. A camera detects spots of light that pass through the first and second mirrors. A high power attenuator formed by a highly reflective mirror pair is positioned between the source and the attenuation module. A second embodiment includes a single mirror plate having highly reflective surfaces. |
| 公开日期 | 2015-12-25 |
| 申请日期 | 2012-10-31 |
| 状态 | 未确认 |
| 内容类型 | 专利 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/57353]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | HAAS LASER TECHNOLOGIES INC. |
| 推荐引用方式 GB/T 7714 | SCAGGS MICHAEL J.. Laser beam analysis apparatus. IN9267CHENP2012A. 2015-12-25. |
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