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	Gas measurement system
	ZEMEK, PETER; CARANGELO, ROBERT M.; YE, HONGKE; WRIGHT, ANDREW
	2018-02-01
著作权人	MKS INSTRUMENTS, INC.
专利号	WO2018022542A1
国家	世界知识产权组织
文献子类	发明申请
其他题名	Gas measurement system
英文摘要	Presented herein are systems and methods for quantifying trace and/or ultra-trace levels of a species - for example, H?2#191S or H?2#191O - in a natural gas line. The systems and methods employ a tunable laser, such as a tunable diode laser, vertical-cavity surface-emitting laser (VCSEL), external cavity diode laser or a vertical external-cavity surface-emitting laser (VECSEL) or a tunable quantum cascade laser (QCL). The laser produces an output beam over a set of one or more relatively narrow, high resolution wavelength bands at a scan rate from about 0.1 Hz to about 1000 Hz. A natural gas sample comprising a trace level of a species of interest passes through a flow cell into which the output beam from the laser is guided. An optical detector receives light from the flow cell, producing a signal indicative of the absorption attenuation from which the concentration of the trace species is determined.
公开日期	2018-02-01
申请日期	2017-07-25
状态	未确认
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/56625]
专题	半导体激光器专利数据库
作者单位	MKS INSTRUMENTS, INC.
推荐引用方式 GB/T 7714	ZEMEK, PETER,CARANGELO, ROBERT M.,YE, HONGKE,et al. Gas measurement system. WO2018022542A1. 2018-02-01.

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