Optical interconnect modules with 3D polymer waveguide
JOU, ABRAHAM; WU, PAUL MAO-JEN
2019-02-14
著作权人ADOLITE INC.
专利号WO2018213041A9
国家世界知识产权组织
文献子类发明申请
其他题名Optical interconnect modules with 3D polymer waveguide
英文摘要An optical interconnect structure connecting a VCSEL laser or a photodetector to a fiber cable with a 3D polymer waveguide is described. The waveguide has a vertical portion at one end of a horizontal trench portion joined by a 45 degree sidewall. The vertical portion interfaces with VCSEL laser arranged on a flexible circuit board. The other end of the horizontal trench portion connects to a fiber via a mechanical transport connector. The flexible structure also holds driver, receiver, pad, amplifier, RF chip and transmission lines. A method of fabrication includes: patterning a polymer cladding layer into a horizontal trench and a 45 degree side wall by applying multiple exposure techniques; filling horizontal trench and 45 degree side wall cavity to form a core followed by planarizing the core layer to remove excess core; patterning a vertical cavity aligned with the 45 degree side wall to form a reflector.
公开日期2019-02-14
申请日期2018-05-07
状态未确认
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/55010]  
专题半导体激光器专利数据库
作者单位ADOLITE INC.
推荐引用方式
GB/T 7714
JOU, ABRAHAM,WU, PAUL MAO-JEN. Optical interconnect modules with 3D polymer waveguide. WO2018213041A9. 2019-02-14.
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