Wafer-level optoelectronic packaging | |
LAM, YEE, LOY | |
2019-05-09 | |
著作权人 | DENSELIGHT SEMICONDUCTORS PTE. LTD. |
专利号 | WO2019086953A1 |
国家 | 世界知识产权组织 |
文献子类 | 发明申请 |
其他题名 | Wafer-level optoelectronic packaging |
英文摘要 | A wafer-level optoelectronic packaging method includes fabricating a pre-singulated wafer. The pre-singulated wafer has a plurality of sub-mounts. A first sub-mount of the plurality of sub- mounts includes an optical waveguide formed on a substrate, a multi-layered sub-mount boundary wall that is formed on the optical waveguide, and a v-groove that is external to the sub- mount boundary wall. A plurality of optical dies are attached to the corresponding plurality of sub-mounts, such that each optical die is aligned to the optical waveguide of the corresponding sub-mount. A cap-wafer including a plurality of caps is attached to the pre-singulated wafer to obtain an encapsulated pre-singulated wafer. The encapsulated pre-singulated wafer is diced to obtain a plurality of optoelectronic packages. The optical waveguide of each optoelectronic package serves as an interconnection conduit between the corresponding optical die and an optical fiber placed in the corresponding v-groove. |
公开日期 | 2019-05-09 |
申请日期 | 2018-10-16 |
状态 | 未确认 |
内容类型 | 专利 |
源URL | [http://ir.opt.ac.cn/handle/181661/54927] |
专题 | 半导体激光器专利数据库 |
作者单位 | DENSELIGHT SEMICONDUCTORS PTE. LTD. |
推荐引用方式 GB/T 7714 | LAM, YEE, LOY. Wafer-level optoelectronic packaging. WO2019086953A1. 2019-05-09. |
个性服务 |
查看访问统计 |
相关权益政策 |
暂无数据 |
收藏/分享 |
除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。
修改评论