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	Structures formed using monocrystalline silicon and/or other materials for optical and other applications
	KOSENKO, VALENTIN; MCBAIN, EDWARD LEE; UZOH, CYPRIAN EMEKA; MONADGEMI, PEZHMAN; SAVASTIOUK, SERGEY
	2013-09-26
著作权人	INVENSAS CORPORATION
专利号	WO2013106285A3
国家	世界知识产权组织
文献子类	发明申请
其他题名	Structures formed using monocrystalline silicon and/or other materials for optical and other applications
英文摘要	An interposer includes grooves (310) for waveguides 104 (e.g. optical fiber cables) coupled to a transducer (120). The grooves are formed by etching a cavity (410) in a substrate (130), filling the cavity with some layer (520), then etching the layer to form the grooves. The grooves can be formed in a separate structure which is then inserted into a cavity in an interposer having electrical circuitry for the transducer. The cavity has outwardly or inwardly sloped sidewalls which can serve as mirrors (144) or on which the mirrors are later formed. The substrate can be monocrystalline silicon, in which the inwardly sloped (retrograde) sidewalls are formed by a combination of different etches at least one of which is selective to certain crystal planes. Other features, including non-optical embodiments, are also provided.
公开日期	2013-09-26
申请日期	2013-01-07
状态	未确认
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/54403]
专题	半导体激光器专利数据库
作者单位	INVENSAS CORPORATION
推荐引用方式 GB/T 7714	KOSENKO, VALENTIN,MCBAIN, EDWARD LEE,UZOH, CYPRIAN EMEKA,et al. Structures formed using monocrystalline silicon and/or other materials for optical and other applications. WO2013106285A3. 2013-09-26.

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