Formation of dendritic nanostructures in Pyrex glass anodically bonded to silicon coated with an aluminum thin film

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	Formation of dendritic nanostructures in Pyrex glass anodically bonded to silicon coated with an aluminum thin film
	Hu YQ(胡宇群); Zhao YP(赵亚溥); Yu TX(余同希); Zhao YP
	2008
会议名称	14th International Conference on the Strength of Materials (ICSMA 14)
会议日期	JUN 04-09, 2006
通讯作者邮箱	yzhao@lnm.imech.ac.cn
会议地点	Xian Jiaotong Univ, Xian, PEOPLES R CHINA
关键词	Anodic Bonding Dendritic Nanostructures Aluminum Thin Film Depletion Layer Mems Ion Drift Processes Borosilicate Glass Depletion
页码	611-616
通讯作者	Zhao YP
中文摘要	Anodic bonding with thin films of metal or alloy as an intermediate layer, finds increasing applications in micro/nanoelectromechanical systems. At the bonding temperature of 350 degrees C, voltage of 400 V, and 30 min duration, the anodic bonding is completed between Pyrex glass and crystalline silicon coated with an aluminum thin film with a thickness comprised between 50 and 230 nm. Sodium-depleted layers and dendritic nanostructures were observed in Pyrex 7740 glass adjacent to the bonding interface. The sodium depletion width does not increase remarkably with the thickness of aluminum film. The dendritic nanostructures result from aluminum diffusion into the Pyrex glass. This experimental research is expected to enhance the understanding of how the depletion layer and dendritic nanostructures affect the quality of anodic bonding. (C) 2007 Elsevier B.V. All rights reserved.
收录类别	CPCI-S
会议录	Materials Science And Engineering A-Structural Materials Properties Microstructure And Processing
会议录出版者	Lausanne
会议录出版地	Elsevier Science Sa
语种	英语
ISSN号	0921-5093
WOS记录号	WOS:000256071100154
内容类型	会议论文
源URL	[http://dspace.imech.ac.cn/handle/311007/25436]
专题	力学研究所_力学所知识产出(1956-2008)
通讯作者	Zhao YP
推荐引用方式 GB/T 7714	Hu YQ,Zhao YP,Yu TX,et al. Formation of dendritic nanostructures in Pyrex glass anodically bonded to silicon coated with an aluminum thin film[C]. 见:14th International Conference on the Strength of Materials (ICSMA 14). Xian Jiaotong Univ, Xian, PEOPLES R CHINA. JUN 04-09, 2006.