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	Microlens frames for laser diode arrays
	SKIDMORE, JAY A.; FREITAS, BARRY L.
	1999-07-13
著作权人	LAWRENCE LIVERMORE NATIONAL SECURITY LLC
专利号	US5923481
国家	美国
文献子类	授权发明
其他题名	Microlens frames for laser diode arrays
英文摘要	Monolithic microlens frames enable the fabrication of monolithic laser diode arrays and are manufactured inexpensively with high registration, and with inherent focal length compensation for any lens diameter variation. A monolithic substrate is used to fabricate a low-cost microlens array. The substrate is wet-etched or sawed with a series of v-grooves. The v-grooves can be created by wet-etching, by exploiting the large etch-rate selectivity of different crystal planes. The v-grooves provide a support frame for either cylindrical or custom-shaped microlenses. Because the microlens frames are formed by photolithographic semiconductor batch-processing techniques, they can be formed inexpensively over large areas with precise lateral and vertical registration. The v-groove has an important advantage for preserving the correct focus for lenses of varying diameter.
公开日期	1999-07-13
申请日期	1996-11-27
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/47817]
专题	半导体激光器专利数据库
作者单位	LAWRENCE LIVERMORE NATIONAL SECURITY LLC
推荐引用方式 GB/T 7714	SKIDMORE, JAY A.,FREITAS, BARRY L.. Microlens frames for laser diode arrays. US5923481. 1999-07-13.

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