Design and Fabrication of a Photonic Crystal Channel Drop Filter Based on an Asymmetric Silicon-on-Insulator Slab
Yu HJ ; Yu JZ ; Yu YD ; Chen SW
会议名称6th international conference on nanoscience and technology
会议日期jun 04-06, 2007
会议地点beijing, peoples r china
关键词Photonic Crystal (PC)
页码9 (2): 974-977 sp. iss. si feb
通讯作者yu, hj, beijing univ posts & telecommun, minist educ, key lab opt commun & lightwave technol, beijing 100876, peoples r china.
中文摘要we report on the design and fabrication of a photonic crystal (pc) channel drop filter based on an asymmetric silicon-on-insulator (soi) slab. the filter is composed of two symmetric stick-shape micro-cavities between two single-line-defect (w1) waveguides in a triangular lattice, and the phase matching condition for the filter to improve the drop efficiency is satisfied by modifying the positions and radii of the air holes around the micro-cavities. a sample is then fabricated by using electron beam lithography (ebl) and inductively coupled plasma (icp) etching processes. the measured 0 factor of the filter is about 1140, and the drop efficiency is estimated to be 73% +/- 5% by fitting the transmission spectrum.
英文摘要we report on the design and fabrication of a photonic crystal (pc) channel drop filter based on an asymmetric silicon-on-insulator (soi) slab. the filter is composed of two symmetric stick-shape micro-cavities between two single-line-defect (w1) waveguides in a triangular lattice, and the phase matching condition for the filter to improve the drop efficiency is satisfied by modifying the positions and radii of the air holes around the micro-cavities. a sample is then fabricated by using electron beam lithography (ebl) and inductively coupled plasma (icp) etching processes. the measured 0 factor of the filter is about 1140, and the drop efficiency is estimated to be 73% +/- 5% by fitting the transmission spectrum.; zhangdi于2010-03-09批量导入; zhangdi于2010-03-09批量导入; natl steering comm nanotechnol.; natl ctr nanosci technol.; minist sci & technol china.; natl nat sci fdn china.; minist educ china.; chinese acad sci.; china assoc sci & technol.; [yu, hejun] beijing univ posts & telecommun, minist educ, key lab opt commun & lightwave technol, beijing 100876, peoples r china; [yu, hejun; yu, jinzhong; yu, yude; chen, shaowu] chinese acad sci, state key lab integrated optoelect, inst semicond, beijing 100083, peoples r china
收录类别其他
会议主办者natl steering comm nanotechnol.; natl ctr nanosci technol.; minist sci & technol china.; natl nat sci fdn china.; minist educ china.; chinese acad sci.; china assoc sci & technol.
会议录journal of nanoscience and nanotechnology
会议录出版者amer scientific publishers ; 25650 north lewis way, stevenson ranch, ca 91381-1439 usa
会议录出版地25650 north lewis way, stevenson ranch, ca 91381-1439 usa
学科主题半导体化学
语种英语
ISSN号1533-4880
内容类型会议论文
源URL[http://ir.semi.ac.cn/handle/172111/8328]  
专题半导体研究所_中国科学院半导体研究所(2009年前)
推荐引用方式
GB/T 7714
Yu HJ,Yu JZ,Yu YD,et al. Design and Fabrication of a Photonic Crystal Channel Drop Filter Based on an Asymmetric Silicon-on-Insulator Slab[C]. 见:6th international conference on nanoscience and technology. beijing, peoples r china. jun 04-06, 2007.
个性服务
查看访问统计
相关权益政策
暂无数据
收藏/分享
所有评论 (0)
暂无评论
 

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。


©版权所有 ©2017 CSpace - Powered by CSpace