Design and Fabrication of a Photonic Crystal Channel Drop Filter Based on an Asymmetric Silicon-on-Insulator Slab | |
Yu HJ ; Yu JZ ; Yu YD ; Chen SW | |
会议名称 | 6th international conference on nanoscience and technology |
会议日期 | jun 04-06, 2007 |
会议地点 | beijing, peoples r china |
关键词 | Photonic Crystal (PC) |
页码 | 9 (2): 974-977 sp. iss. si feb |
通讯作者 | yu, hj, beijing univ posts & telecommun, minist educ, key lab opt commun & lightwave technol, beijing 100876, peoples r china. |
中文摘要 | we report on the design and fabrication of a photonic crystal (pc) channel drop filter based on an asymmetric silicon-on-insulator (soi) slab. the filter is composed of two symmetric stick-shape micro-cavities between two single-line-defect (w1) waveguides in a triangular lattice, and the phase matching condition for the filter to improve the drop efficiency is satisfied by modifying the positions and radii of the air holes around the micro-cavities. a sample is then fabricated by using electron beam lithography (ebl) and inductively coupled plasma (icp) etching processes. the measured 0 factor of the filter is about 1140, and the drop efficiency is estimated to be 73% +/- 5% by fitting the transmission spectrum. |
英文摘要 | we report on the design and fabrication of a photonic crystal (pc) channel drop filter based on an asymmetric silicon-on-insulator (soi) slab. the filter is composed of two symmetric stick-shape micro-cavities between two single-line-defect (w1) waveguides in a triangular lattice, and the phase matching condition for the filter to improve the drop efficiency is satisfied by modifying the positions and radii of the air holes around the micro-cavities. a sample is then fabricated by using electron beam lithography (ebl) and inductively coupled plasma (icp) etching processes. the measured 0 factor of the filter is about 1140, and the drop efficiency is estimated to be 73% +/- 5% by fitting the transmission spectrum.; zhangdi于2010-03-09批量导入; zhangdi于2010-03-09批量导入; natl steering comm nanotechnol.; natl ctr nanosci technol.; minist sci & technol china.; natl nat sci fdn china.; minist educ china.; chinese acad sci.; china assoc sci & technol.; [yu, hejun] beijing univ posts & telecommun, minist educ, key lab opt commun & lightwave technol, beijing 100876, peoples r china; [yu, hejun; yu, jinzhong; yu, yude; chen, shaowu] chinese acad sci, state key lab integrated optoelect, inst semicond, beijing 100083, peoples r china |
收录类别 | 其他 |
会议主办者 | natl steering comm nanotechnol.; natl ctr nanosci technol.; minist sci & technol china.; natl nat sci fdn china.; minist educ china.; chinese acad sci.; china assoc sci & technol. |
会议录 | journal of nanoscience and nanotechnology |
会议录出版者 | amer scientific publishers ; 25650 north lewis way, stevenson ranch, ca 91381-1439 usa |
会议录出版地 | 25650 north lewis way, stevenson ranch, ca 91381-1439 usa |
学科主题 | 半导体化学 |
语种 | 英语 |
ISSN号 | 1533-4880 |
内容类型 | 会议论文 |
源URL | [http://ir.semi.ac.cn/handle/172111/8328] |
专题 | 半导体研究所_中国科学院半导体研究所(2009年前) |
推荐引用方式 GB/T 7714 | Yu HJ,Yu JZ,Yu YD,et al. Design and Fabrication of a Photonic Crystal Channel Drop Filter Based on an Asymmetric Silicon-on-Insulator Slab[C]. 见:6th international conference on nanoscience and technology. beijing, peoples r china. jun 04-06, 2007. |
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