High Q microring resonator in silicon-on-insulator rib waveguides - art. no. 68380J

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	High Q microring resonator in silicon-on-insulator rib waveguides - art. no. 68380J
	Huang, QZ ; Yu, JZ ; Chen, SW ; Xu, XJ ; Han, WH ; Fan, ZC
	2008
会议名称	2nd conference on optoelectronic devices and integration
会议日期	nov 12-15, 2007
会议地点	beijing, peoples r china
关键词	resonator silicon-on-insulator quality factor propagation loss
页码	6838: j8380-j8380
通讯作者	huang, qz, chinese acad sci, inst semicond, natl key lab integrated optoelect, beijing 100083, peoples r china.
中文摘要	a high quality (q) factor microring resonator in silicon-on-insulator rib waveguides was fabricated by electron beam lithography, followed by inductively coupled plasma etching. the waveguide dimensions were scaled down to submicron, for a low bending loss and compactness. experimentally, the resonator has been realized with a quality factor as high as 21,200, as well as a large extinction ratio 12.5db at telecommunication wavelength near 1550nm. from the measured results, propagation loss in the rib waveguide is determined as low as 6.900/cm. this high q microring resonator is expected to lead to high speed optical modulators and bio-sensing devices.
英文摘要	a high quality (q) factor microring resonator in silicon-on-insulator rib waveguides was fabricated by electron beam lithography, followed by inductively coupled plasma etching. the waveguide dimensions were scaled down to submicron, for a low bending loss and compactness. experimentally, the resonator has been realized with a quality factor as high as 21,200, as well as a large extinction ratio 12.5db at telecommunication wavelength near 1550nm. from the measured results, propagation loss in the rib waveguide is determined as low as 6.900/cm. this high q microring resonator is expected to lead to high speed optical modulators and bio-sensing devices.; zhangdi于2010-03-09批量导入; made available in dspace on 2010-03-09t02:11:54z (gmt). no. of bitstreams: 1 677.pdf: 332177 bytes, checksum: 693feecea2c1a6d47be9c959b0e2c812 (md5) previous issue date: 2008; spie.; chinese opt soc.; [huang, qingzhong; yu, jinzhong; chen, shaowu; xu, xuejun; han, weihua; fan, zhongchao] chinese acad sci, inst semicond, natl key lab integrated optoelect, beijing 100083, peoples r china
收录类别	CPCI-S
会议主办者	spie.; chinese opt soc.
会议录	optoelectronic devices and integration ii
会议录出版者	spie-int soc optical engineering ; 1000 20th st, po box 10, bellingham, wa 98227-0010 usa
会议录出版地	1000 20th st, po box 10, bellingham, wa 98227-0010 usa
学科主题	光电子学
语种	英语
ISSN号	0277-786x
ISBN号	978-0-8194-7013-3
内容类型	会议论文
源URL	[http://ir.semi.ac.cn/handle/172111/7796]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Huang, QZ,Yu, JZ,Chen, SW,et al. High Q microring resonator in silicon-on-insulator rib waveguides - art. no. 68380J[C]. 见:2nd conference on optoelectronic devices and integration. beijing, peoples r china. nov 12-15, 2007.