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Enhanced adhesion and conductivity of Cu electrode on AlN substrate for thin film thermoelectric device
Hu, Shaoxiong; Chen, Xin; Deng, Yuan; Wang, Yao; Gao, Hongli; Zhu, Wei; Cao, Lili; Luo, Bingwei; Zhu, Zhixiang; Ma, Guang
刊名FUNCTIONAL MATERIALS LETTERS
2015
卷号8
关键词Copper AlN substrate thin film electrode adhesion magnetron sputtering
ISSN号1793-6047
DOI10.1142/S1793604715500320
URL标识查看原文
收录类别SCIE ; EI
WOS记录号WOS:000360121300004
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/6539068
专题北京航空航天大学
推荐引用方式
GB/T 7714
Hu, Shaoxiong,Chen, Xin,Deng, Yuan,et al. Enhanced adhesion and conductivity of Cu electrode on AlN substrate for thin film thermoelectric device[J]. FUNCTIONAL MATERIALS LETTERS,2015,8.
APA Hu, Shaoxiong.,Chen, Xin.,Deng, Yuan.,Wang, Yao.,Gao, Hongli.,...&Han, Yu.(2015).Enhanced adhesion and conductivity of Cu electrode on AlN substrate for thin film thermoelectric device.FUNCTIONAL MATERIALS LETTERS,8.
MLA Hu, Shaoxiong,et al."Enhanced adhesion and conductivity of Cu electrode on AlN substrate for thin film thermoelectric device".FUNCTIONAL MATERIALS LETTERS 8(2015).
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