A new method to fabricate InGaN quantum dots by metalorganic chemical vapor deposition

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	A new method to fabricate InGaN quantum dots by metalorganic chemical vapor deposition
	Chen Z ; Lu DH ; Yuan HR ; Han P ; Liu XL ; Li YF ; Wang XH ; Lu Y ; Wang ZG
刊名	journal of crystal growth
	2002
卷号	235 期号:1-4 页码:188-194
关键词	nanostructures metalorganic chemical vapor deposition nitrides GAN BUFFER LAYER EPITAXIAL-GROWTH PHASE EPITAXY SURFACES TEMPERATURE DEPENDENCE MODE WIRE
ISSN号	0022-0248
通讯作者	lu dh,chinese acad sci,inst semicond,lab semicond mat & sci,pob 912,beijing 100083,peoples r china.
中文摘要	a new method to form nanoscale ingan quantum dots using mocvd is reported, this method is much different from a method. which uses surfactant or the stranski-krastannow growth mode. the dots were formed by increasing the energy barrier for adatoms, which are hopping by surface passivation, and by decreasing the growth temperature. thus, the new method can be called as a passivation-low-temperature method. regular high-temperature gan films were grown first and were passivated. a low-temperature thin layer of gan dot was then deposited on the surface that acted as the adjusting layer. at last the high-density ingan dots could be fabricated on the adjusting layer. atomic force microscopy measurement revealed that ingan dots were small enough to expect zero-dimensional quantum effects: the islands were typically 80 nm wide and 5 nm high. their density was about 6 x 10(10) cm(-2). strong photoluminescence emission from the dots is observed at room temperature, which is much stronger than that of the homogeneous ingan film with the same growth time. furthermore, the pl emission of the gan adjusting layer shows 21 mev blueshift compared with the band edge emission of the gan due to quantum confine effect. (c) 2002 elsevier science b.v. all rights reserved.
学科主题	半导体材料
收录类别	SCI
语种	英语
公开日期	2010-08-12
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/11990]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Chen Z,Lu DH,Yuan HR,et al. A new method to fabricate InGaN quantum dots by metalorganic chemical vapor deposition[J]. journal of crystal growth,2002,235(1-4):188-194.
APA	Chen Z.,Lu DH.,Yuan HR.,Han P.,Liu XL.,...&Wang ZG.(2002).A new method to fabricate InGaN quantum dots by metalorganic chemical vapor deposition.journal of crystal growth,235(1-4),188-194.
MLA	Chen Z,et al."A new method to fabricate InGaN quantum dots by metalorganic chemical vapor deposition".journal of crystal growth 235.1-4(2002):188-194.