Influence of cracks generation on the structural and optical properties of GaN/Al0.55Ga0.45N multiple quantum wells

CORC > 半导体研究所 > 中国科学院半导体研究所 > 中国科学院半导体研究所（2009年前）

	Influence of cracks generation on the structural and optical properties of GaN/Al0.55Ga0.45N multiple quantum wells
	Zhang SM
刊名	applied surface science
	2006
卷号	252 期号:8 页码:3043-3050
关键词	nitrides multiple quantum wells cracks dislocations vacancies x-ray diffraction X-RAY-DIFFRACTION EDGE DISLOCATIONS GAN FILMS SUPERLATTICES RELAXATION STRAIN
ISSN号	0169-4332
通讯作者	sun, q, chinese acad sci, inst semicond, state key lab integrated optoelect, beijing 100083, peoples r china. e-mail: qsun@red.semi.ac.cn
中文摘要	both cracked and crack-free gan/al0.55ga0.45n multiple quantum wells (mqws) grown on gan template by metalorganic chemical vapor deposition have been studied by triple-axis x-ray diffraction, grazing-incidence x-ray reflectivity, atomic force microscope, photoluminescence spectroscopy and low-energy positron annihilation spectroscopy. the experimental results show that cracks generation not only deteriorates the surface morphology, but also leads to a period dispersion and roughens the interfaces of mqws. the mean density of dislocations in mqws, determined from the average full-width at half-maximum of to-scan of each satellite peak, has been significantly enhanced by the cracks generation. furthermore, the measurement of annihilation-line doppler broadening reveals a higher concentration of negatively charged vacancies in the cracked mqws. the combination of these vacancies and the high density of edge dislocations are assumed to contribute to the highly enhanced yellow luminescence in the cracked sample. (c) 2005 elsevier b.v. all rights reserved.
学科主题	光电子学
收录类别	SCI
语种	英语
公开日期	2010-04-11
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/10814]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Zhang SM. Influence of cracks generation on the structural and optical properties of GaN/Al0.55Ga0.45N multiple quantum wells[J]. applied surface science,2006,252(8):3043-3050.
APA	Zhang SM.(2006).Influence of cracks generation on the structural and optical properties of GaN/Al0.55Ga0.45N multiple quantum wells.applied surface science,252(8),3043-3050.
MLA	Zhang SM."Influence of cracks generation on the structural and optical properties of GaN/Al0.55Ga0.45N multiple quantum wells".applied surface science 252.8(2006):3043-3050.