Design, fabrication, and characterization of an ultracompact low-loss photonic crystal corner mirror

CORC > 半导体研究所 > 中国科学院半导体研究所 > 中国科学院半导体研究所（2009年前）

	Design, fabrication, and characterization of an ultracompact low-loss photonic crystal corner mirror
	Yu HJ (Yu Hejun) ; Yu JZ (Yu Jinzhong) ; Yu Y (Yu Yude) ; Fan ZC (Fan Zhong-Chao) ; Chen SW (Chen Shaowu)
刊名	ieee journal of quantum electronics
	2007
卷号	43 期号:9-10 页码:876-883
关键词	corner mirror
ISSN号	issn: 0018-9197
通讯作者	yu, hj, chinese acad sci, inst semicond, beijing 100083, peoples r china. 电子邮箱地址: yhjun@red.semi.ac.cn
中文摘要	an ultracompact, low-loss, and broad-band corner mirror, based on photonic crystals, is investigated in this paper. based on the theoretical analysis of the loss mechanism, the boundary layers of the photonic crystal region are revised to improve the extra losses, and the transmission characteristics are evaluated by using the 3-d finite-difference time-domain method. the device with optimized structure was fabricated on silicon-on-insulator substrate by using electron-beam lithography and inductively coupled plasma etching. the measured extra losses are about 1.1 +/- 0.4 db per corner mirror for transverse-electronic polarization for the scanning wavelength range of 1510-1630 nm. dimensions of the achieved pc corner mirror are less than ;7 x 7 mu m(2), which are only about one tenth of conventional wave-guide corner mirrors.
学科主题	半导体材料
收录类别	SCI
语种	英语
公开日期	2010-03-29
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/9240]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Yu HJ ,Yu JZ ,Yu Y ,et al. Design, fabrication, and characterization of an ultracompact low-loss photonic crystal corner mirror[J]. ieee journal of quantum electronics,2007,43(9-10):876-883.
APA	Yu HJ ,Yu JZ ,Yu Y ,Fan ZC ,&Chen SW .(2007).Design, fabrication, and characterization of an ultracompact low-loss photonic crystal corner mirror.ieee journal of quantum electronics,43(9-10),876-883.
MLA	Yu HJ ,et al."Design, fabrication, and characterization of an ultracompact low-loss photonic crystal corner mirror".ieee journal of quantum electronics 43.9-10(2007):876-883.