Thermally tunable optical filter with crystalline silicon as cavity

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	Thermally tunable optical filter with crystalline silicon as cavity
	Li CB ; Zuo YH ; Cheng BW ; Mao RW ; Zhao L ; Shi WH ; Luo LP ; Yu JZ ; Wang QM
刊名	optics communications
	2005
卷号	244 期号:1-6 页码:167-170
关键词	thermally tunable filter
ISSN号	0030-4018
通讯作者	li, cb, chinese acad sci, inst semicond, state key lab integrated optoelect, pob 912, beijing 100083, peoples r china. 电子邮箱地址: cbli@mail.semi.ac.cn
中文摘要	a novel method to fabricate a thermally tunable filter with a tuning range of 26 nm from 1.504 to 1.530 mum is reported. the high-reffectivity bottom mirror is deposited in the hole formed by anisotropically etching in the basic solution from the backside of the slice with the buried sio2 layer in silicon-on-insulator substrate as the etching-stop layer. because of the formation of the mesa and the removing of the substrate of the hole, the power from the metal heater can be more effectively consumed in the crystalline silicon cavity. so it lowers the power consumption and the filter has a higher tuning range. (c) 2004 elsevier b.v. all rights reserved.
学科主题	光电子学
收录类别	SCI
语种	英语
公开日期	2010-03-17
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/8884]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Li CB,Zuo YH,Cheng BW,et al. Thermally tunable optical filter with crystalline silicon as cavity[J]. optics communications,2005,244(1-6):167-170.
APA	Li CB.,Zuo YH.,Cheng BW.,Mao RW.,Zhao L.,...&Wang QM.(2005).Thermally tunable optical filter with crystalline silicon as cavity.optics communications,244(1-6),167-170.
MLA	Li CB,et al."Thermally tunable optical filter with crystalline silicon as cavity".optics communications 244.1-6(2005):167-170.