Fabrication and characterization of integrated three-dimensional linear taper on silicon-on-insulator

	Fabrication and characterization of integrated three-dimensional linear taper on silicon-on-insulator
	Yang, ZF ; Fang, N ; Wu, AM ; Chen, J ; Zhang, M（重点实验室） ; Wang, X（重点实验室） ; Zou, SC（重点实验室）
刊名	OPTICAL ENGINEERING
	2009
卷号	48 期号:3 页码:30503
关键词	Optics
ISSN号	0091-3286
学科主题	Optics
收录类别	SCI
原文出处	10.1117/1.3095916
语种	英语
公开日期	2013-05-10
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/115095]
专题	上海微系统与信息技术研究所_信息功能材料国家重点实验室2008-2012_期刊论文
推荐引用方式 GB/T 7714	Yang, ZF,Fang, N,Wu, AM,et al. Fabrication and characterization of integrated three-dimensional linear taper on silicon-on-insulator[J]. OPTICAL ENGINEERING,2009,48(3):30503.
APA	Yang, ZF.,Fang, N.,Wu, AM.,Chen, J.,Zhang, M.,...&Zou, SC.(2009).Fabrication and characterization of integrated three-dimensional linear taper on silicon-on-insulator.OPTICAL ENGINEERING,48(3),30503.
MLA	Yang, ZF,et al."Fabrication and characterization of integrated three-dimensional linear taper on silicon-on-insulator".OPTICAL ENGINEERING 48.3(2009):30503.