Experimental investigation on submicron rib waveguide microring/racetrack resonators in silicon-on-insulator

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	Experimental investigation on submicron rib waveguide microring/racetrack resonators in silicon-on-insulator
	Huang, QZ ; Yu, YD ; Yu, JZ
刊名	optics communications
	2009
卷号	282 期号:1 页码:22-26
关键词	Resonators Submicron rib waveguides Silicon-on-insulator Polarization
ISSN号	0030-4018
其他题名	mannual of ir1
通讯作者	yu, jz, chinese acad sci, inst semicond, natl key lab integrated optoelect, beijing 100083, peoples r china. 电子邮箱地址: jzyu@red.semi.ac.cn
合作状况	填入合作性质等
中文摘要	in experiment, characteristics of silicon microring/racetrack resonators in submicron rib waveguides have been systematically investigated. it is demonstrated that only a transverse-electric mode is guided for a ratio of slab height to rib height h/h = 0.5. thus, these microring/racetrack resonators can only function for quasi-transverse-electric mode, while they get rid of transverse-magnetic polarization. electron beam lithography and inductively coupled plasma etching were employed and improved to reduce side-wall roughness for low propagation loss and high performance resonators. then, the effects of waveguide dimensions, coupling region design, waveguide roughness, and oxide cladding for the resonators have been considered and analyzed. (c) 2008 elsevier b.v. all rights reserved.
学科主题	光电子学
收录类别	SCI
资助信息	state key development program for basic research of china 2006cb302803 2007cb613405 state high technology research and development program of china 2006aa03z424 national natural science foundation of china 60577044 the authors appreciate dr. han, dr. fan, liu, wang, and wang at the institute of semiconductors, chinese academy of sciences, for their constructive advice in the experiments. this work is supported by state key development program for basic research of china (grant nos. 2006cb302803 and 2007cb613405). the state high technology research and development program of china (grant no. 2006aa03z424) and the national natural science foundation of china (grant no. 60577044).
语种	英语
公开日期	2010-03-08
附注	description.abstract
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/6322]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Huang, QZ,Yu, YD,Yu, JZ. Experimental investigation on submicron rib waveguide microring/racetrack resonators in silicon-on-insulator[J]. optics communications,2009,282(1):22-26.
APA	Huang, QZ,Yu, YD,&Yu, JZ.(2009).Experimental investigation on submicron rib waveguide microring/racetrack resonators in silicon-on-insulator.optics communications,282(1),22-26.
MLA	Huang, QZ,et al."Experimental investigation on submicron rib waveguide microring/racetrack resonators in silicon-on-insulator".optics communications 282.1(2009):22-26.