A novel method of temperature compensation for piezoresistive microcantilever-based sensors

	A novel method of temperature compensation for piezoresistive microcantilever-based sensors
	Han, JQ ; Wang, XF ; Yan, TH ; Li, Y ; Song, MX
刊名	REVIEW OF SCIENTIFIC INSTRUMENTS
	2012
卷号	83 期号:3 页码:35002
ISSN号	0034-6748
通讯作者	Han, JQ (reprint author), China Jiliang Univ, Coll Mech & Elect Engn, 258 Xueyuan Rd,Xiasha High Edu Pk, Hangzhou 310018, Zhejiang, Peoples R China.
中文摘要	Microcantilever with integrated piezoresistor has been applied to in situ surface stress measurement in the field of biochemical sensors. It is well known that piezoresistive cantilever-based sensors are sensitive to ambient temperature changing due to hi
学科主题	Instruments & Instrumentation; Physics
收录类别	2012SCI-167
原文出处	10.1063/1.3690380
语种	英语
公开日期	2013-04-23
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/114923]
专题	上海微系统与信息技术研究所_微系统技术_期刊论文
推荐引用方式 GB/T 7714	Han, JQ,Wang, XF,Yan, TH,et al. A novel method of temperature compensation for piezoresistive microcantilever-based sensors[J]. REVIEW OF SCIENTIFIC INSTRUMENTS,2012,83(3):35002.
APA	Han, JQ,Wang, XF,Yan, TH,Li, Y,&Song, MX.(2012).A novel method of temperature compensation for piezoresistive microcantilever-based sensors.REVIEW OF SCIENTIFIC INSTRUMENTS,83(3),35002.
MLA	Han, JQ,et al."A novel method of temperature compensation for piezoresistive microcantilever-based sensors".REVIEW OF SCIENTIFIC INSTRUMENTS 83.3(2012):35002.