Design, Fabrication, and Characterization of a High-Heating-Efficiency 3-D Microheater for Catalytic Gas Sensors

	Design, Fabrication, and Characterization of a High-Heating-Efficiency 3-D Microheater for Catalytic Gas Sensors
	Xu, L ; Wang, YC ; Zhou, H ; Liu, YX ; Li, T ; Wang, YL
刊名	JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
	2012
卷号	21 期号:6 页码:1402-1409
关键词	Anisotropic etching catalytic gas sensors concave-shaped membrane power per active area (PPAA) sol-gel 3-D microheaters
ISSN号	1057-7157
通讯作者	Xu, L (reprint author), Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China.
中文摘要	In this paper, a novel 3-D microheater has been developed in order to improve the performance of catalytic gas sensors. The 3-D microheater consists of a platinum heater embedded in a concave-shaped membrane which was formed in twice wet-chemical anisotro
学科主题	Engineering
收录类别	2012SCI-002
原文出处	10.1109/JMEMS.2012.2208219
语种	英语
公开日期	2013-04-23
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/114886]
专题	上海微系统与信息技术研究所_微系统技术_期刊论文
推荐引用方式 GB/T 7714	Xu, L,Wang, YC,Zhou, H,et al. Design, Fabrication, and Characterization of a High-Heating-Efficiency 3-D Microheater for Catalytic Gas Sensors[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,2012,21(6):1402-1409.
APA	Xu, L,Wang, YC,Zhou, H,Liu, YX,Li, T,&Wang, YL.(2012).Design, Fabrication, and Characterization of a High-Heating-Efficiency 3-D Microheater for Catalytic Gas Sensors.JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,21(6),1402-1409.
MLA	Xu, L,et al."Design, Fabrication, and Characterization of a High-Heating-Efficiency 3-D Microheater for Catalytic Gas Sensors".JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 21.6(2012):1402-1409.