Experimental study on formability of bulk metallic glass as mold for microstructure replication

	Experimental study on formability of bulk metallic glass as mold for microstructure replication
	Mei L. ; Liu J. B. ; Huang Y. J. ; Lin J. ; Shen J. ; Tan J. B. ; Jin P.
刊名	Microelectronic Engineering
	2012
卷号	98 页码:142-146
ISSN号	0167-9317
收录类别	SCI
语种	英语
公开日期	2013-03-27
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/34354]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Mei L.,Liu J. B.,Huang Y. J.,et al. Experimental study on formability of bulk metallic glass as mold for microstructure replication[J]. Microelectronic Engineering,2012,98:142-146.
APA	Mei L..,Liu J. B..,Huang Y. J..,Lin J..,Shen J..,...&Jin P..(2012).Experimental study on formability of bulk metallic glass as mold for microstructure replication.Microelectronic Engineering,98,142-146.
MLA	Mei L.,et al."Experimental study on formability of bulk metallic glass as mold for microstructure replication".Microelectronic Engineering 98(2012):142-146.