A composite insulation structure for silicon-based planar neuroprobes

	A composite insulation structure for silicon-based planar neuroprobes
	Zhao H (Zhao Hui) ; Pei WH (Pei WeiHua) ; Chen SY (Chen SanYuan) ; Gui Q (Gui Qiang) ; Tang RY (Tang RongYu) ; Guo K (Guo Kai) ; Chen HD (Chen HongDa)
刊名	science china-technological sciences
	2012
卷号	55 期号:9 页码:2436-2440
学科主题	光电子学
收录类别	SCI
语种	英语
公开日期	2013-04-02
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/23833]
专题	半导体研究所_集成光电子学国家重点实验室
推荐引用方式 GB/T 7714	Zhao H ,Pei WH ,Chen SY ,et al. A composite insulation structure for silicon-based planar neuroprobes[J]. science china-technological sciences,2012,55(9):2436-2440.
APA	Zhao H .,Pei WH .,Chen SY .,Gui Q .,Tang RY .,...&Chen HD .(2012).A composite insulation structure for silicon-based planar neuroprobes.science china-technological sciences,55(9),2436-2440.
MLA	Zhao H ,et al."A composite insulation structure for silicon-based planar neuroprobes".science china-technological sciences 55.9(2012):2436-2440.