An Experimental Study of Carbon Dioxide Condensation in Mini Channels

CORC > 工程热物理研究所 > 中国科学院工程热物理研究所 > Journal of Thermal Science > 期刊论文

	An Experimental Study of Carbon Dioxide Condensation in Mini Channels
	Xiulan HUAIl ; Shigeru KOYAMA2
刊名	JOURNAL OF THERMAL SCIENCE
	2004
卷号	13 期号:4 页码:358,365
关键词	carbon dioxide condensation heat transfer pressure drop mini channels.
英文摘要	For the purpose of decomposing the processing gases CF4 from semiconductor manufacturers, ceramic honeycomb regenerative burner system is suggested by using the principle of HTAC. A simulated high temperature air combustion furnace has been used to determine the features of HTAC flames and the results of the decomposition of CF4. The preheat air temperature of it is above 900°C. The exhaust gas released into the atmosphere is lower than 150°C. Moreover, the efficiency of recovery of waste heat is higher than 80%, the NOx level in exhaust gas is less than 198 mg/m3 and the distribution of temperature in the furnace is nearly uniform. The factors influencing on heat transfer, temperature profile in chamber and NOx emission were discussed. Also some CF4 can be decomposed in this system
WOS记录号	WOS:000208228300012
公开日期	2013-03-11
内容类型	期刊论文
源URL	[http://ir.etp.ac.cn/handle/311046/53382]
专题	工程热物理研究所_Journal of Thermal Science_期刊论文
推荐引用方式 GB/T 7714	Xiulan HUAIl,Shigeru KOYAMA2. An Experimental Study of Carbon Dioxide Condensation in Mini Channels[J]. JOURNAL OF THERMAL SCIENCE,2004,13(4):358,365.
APA	Xiulan HUAIl,&Shigeru KOYAMA2.(2004).An Experimental Study of Carbon Dioxide Condensation in Mini Channels.JOURNAL OF THERMAL SCIENCE,13(4),358,365.
MLA	Xiulan HUAIl,et al."An Experimental Study of Carbon Dioxide Condensation in Mini Channels".JOURNAL OF THERMAL SCIENCE 13.4(2004):358,365.