| A method to improve uniformity of material removal of chemical mechanical polishing in LCOS process | |
| Sun, Yuhui; Kang, Renke; Guo, Dongming | |
| 2008 | |
| 会议名称 | Key Engineering Materials |
| 会议日期 | 2008-01-01 |
| 页码 | 686-689 |
| 会议录 | Key Engineering Materials
 |
| URL标识 | 查看原文 |
| 内容类型 | 会议论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/5613967 |
| 专题 | 大连理工大学 |
| 作者单位 | Key Laboratory for Precision and Non-traditional Machining Technology, Ministry of Education, Dalian University of Technology, Dalian 116023, China |
| 推荐引用方式 GB/T 7714 | Sun, Yuhui,Kang, Renke,Guo, Dongming. A method to improve uniformity of material removal of chemical mechanical polishing in LCOS process[C]. 见:Key Engineering Materials. 2008-01-01. |
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