| Polishing of Free-standing CVD Diamond Films by the Combination of EDM and CMP | |
| Yuan, Z. W.; Jin, Z. J.; Dong, B. X.; Kang, R. K. | |
| 2008 | |
| 会议名称 | International Conference on Surface Finishing Technology and Surface Engineering |
| 会议日期 | 2008-01-01 |
| 会议地点 | Taiyuan, PEOPLES R CHINA |
| 关键词 | CVD diamond film EDM CMP Electroless nickel-phosphorous |
| 页码 | 111-118 |
| 会议录 | International Conference on Surface Finishing Technology and Surface Engineering
 |
| URL标识 | 查看原文 |
| 内容类型 | 会议论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/5608600 |
| 专题 | 大连理工大学 |
| 作者单位 | Dalian Univ Technol, Minist Educ, Key Lab Precis & Nontradit Machining, Dalian 116024, Peoples R China. |
| 推荐引用方式 GB/T 7714 | Yuan, Z. W.,Jin, Z. J.,Dong, B. X.,et al. Polishing of Free-standing CVD Diamond Films by the Combination of EDM and CMP[C]. 见:International Conference on Surface Finishing Technology and Surface Engineering. Taiyuan, PEOPLES R CHINA. 2008-01-01. |
| 个性服务 |
| 查看访问统计 |
| 相关权益政策 |
| 暂无数据 |
| 收藏/分享 |
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。
修改评论