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	Fabrication of 3D SiOx structures using patterned PMMA sacrificial layer
	Li, Zhiqin; Xiang, Quan; Zheng, Mengjie; Bi, Kaixi; Chen, Yiqin; Chen, Keqiu; Duan, Huigao
刊名	JOURNAL OF MICROMECHANICS AND MICROENGINEERING
	2018
卷号	Vol.28 No.2
ISSN号	0960-1317
URL标识	查看原文
公开日期	[db:dc_date_available]
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/5467357
专题	湖南大学
作者单位	1.School of Physics and Electronics, State Key Laboratory of Advanced Design and Manufacturing for Vehicle Body, Hunan University, Changsha 2.410082, China 3.College of Mechanical and Vehicle Engineering, State Key Laboratory of Advanced Design and Ma
推荐引用方式 GB/T 7714	Li, Zhiqin,Xiang, Quan,Zheng, Mengjie,et al. Fabrication of 3D SiOx structures using patterned PMMA sacrificial layer[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2018,Vol.28 No.2.
APA	Li, Zhiqin.,Xiang, Quan.,Zheng, Mengjie.,Bi, Kaixi.,Chen, Yiqin.,...&Duan, Huigao.(2018).Fabrication of 3D SiOx structures using patterned PMMA sacrificial layer.JOURNAL OF MICROMECHANICS AND MICROENGINEERING,Vol.28 No.2.
MLA	Li, Zhiqin,et al."Fabrication of 3D SiOx structures using patterned PMMA sacrificial layer".JOURNAL OF MICROMECHANICS AND MICROENGINEERING Vol.28 No.2(2018).

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