Novel temperature sensor based on Fabry-Perot cavity structure and micro-mechanical bi-layered membranes | |
Liu, YM; Zhao, XQ; Zhang, SJ | |
2006 | |
会议名称 | 20th Congress of the International-Commission-for-Optics |
会议日期 | 2005-08-21 |
会议地点 | Changchun, PEOPLES R CHINA |
关键词 | temperature sensor Fabry-Perot cavity bi-layer membranes optical fiber |
会议录 | ICO20: MEM, MOEMS, AND NEMS |
URL标识 | 查看原文 |
WOS记录号 | WOS:000235333300010 |
内容类型 | 会议论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/5433315 |
专题 | 西安理工大学 |
推荐引用方式 GB/T 7714 | Liu, YM,Zhao, XQ,Zhang, SJ. Novel temperature sensor based on Fabry-Perot cavity structure and micro-mechanical bi-layered membranes[C]. 见:20th Congress of the International-Commission-for-Optics. Changchun, PEOPLES R CHINA. 2005-08-21. |
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