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Novel temperature sensor based on Fabry-Perot cavity structure and micro-mechanical bi-layered membranes
Liu, YM; Zhao, XQ; Zhang, SJ
2006
会议名称20th Congress of the International-Commission-for-Optics
会议日期2005-08-21
会议地点Changchun, PEOPLES R CHINA
关键词temperature sensor Fabry-Perot cavity bi-layer membranes optical fiber
会议录ICO20: MEM, MOEMS, AND NEMS
URL标识查看原文
WOS记录号WOS:000235333300010
内容类型会议论文
URI标识http://www.corc.org.cn/handle/1471x/5433315
专题西安理工大学
推荐引用方式
GB/T 7714
Liu, YM,Zhao, XQ,Zhang, SJ. Novel temperature sensor based on Fabry-Perot cavity structure and micro-mechanical bi-layered membranes[C]. 见:20th Congress of the International-Commission-for-Optics. Changchun, PEOPLES R CHINA. 2005-08-21.
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