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	Fast Macropore Etching via Large Current and High HF Concentration on P-type Silicon
	Ge, D.H.[1]; Ren, N.F.[2]; Wang, Q.[3]
	2014
会议名称	CORROSION POSTERS (GENERAL) - 224TH ECS MEETING
会议日期	2014-01-01
页码	23-27
收录类别	EI ; CPCI-S
URL标识	查看原文
WOS记录号	WOS:000354460800004
内容类型	会议论文
URI标识	http://www.corc.org.cn/handle/1471x/5397159
专题	江苏大学
作者单位	[1]School of Mechanical Engineering, Jiangsu University, Zhenjiang 212013, China |State Key Laboratories of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China[2]School of Mechanical Engineering, Jiangsu University, Zhenjiang 212013, China [3]School of Mechanical Engineering, Jiangsu University, Zhenjiang 212013, China
推荐引用方式 GB/T 7714	Ge, D.H.[1],Ren, N.F.[2],Wang, Q.[3]. Fast Macropore Etching via Large Current and High HF Concentration on P-type Silicon[C]. 见:CORROSION POSTERS (GENERAL) - 224TH ECS MEETING. 2014-01-01.

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