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	Polystyrene-Core Silica-Shell Composite Abrasives: The Influence of Core Size on Oxide Chemical Mechanical Planarization
	Chen, Ailian[1]; Chen, Yang[2]; Ding, Jianning[3]
刊名	JOURNAL OF ELECTRONIC MATERIALS
	2015
卷号	44期号:7页码:2522-2528
关键词	Core/shell structure composite particle core size chemical mechanical planarization
ISSN号	0361-5235
DOI	http://dx.doi.org/10.1007/s11664-015-3815-4
URL标识	查看原文
收录类别	SCI(E) ; EI
WOS记录号	WOS:000355656000038
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/5394026
专题	江苏大学
作者单位	1.[1]Jiangsu Univ, Sch Mech Engn, Zhenjiang 212013, Jiangsu, Peoples R China.,Changzhou Univ, Sch Mech Engn, Changzhou 213016, Jiangsu, Peoples R China. 2.[2]Changzhou Univ, Sch Mat Sci & Engn, Changzhou 213164, Jiangsu, Peoples R China. 3.[3]Jiangsu Univ, Sch Mech Engn, Zhenjiang 212013, Jiangsu, Peoples R China.,Changzhou Univ, Sch Mech Engn, Changzhou 213016, Jiangsu, Peoples R China.
推荐引用方式 GB/T 7714	Chen, Ailian[1],Chen, Yang[2],Ding, Jianning[3]. Polystyrene-Core Silica-Shell Composite Abrasives: The Influence of Core Size on Oxide Chemical Mechanical Planarization[J]. JOURNAL OF ELECTRONIC MATERIALS,2015,44(7):2522-2528.
APA	Chen, Ailian[1],Chen, Yang[2],&Ding, Jianning[3].(2015).Polystyrene-Core Silica-Shell Composite Abrasives: The Influence of Core Size on Oxide Chemical Mechanical Planarization.JOURNAL OF ELECTRONIC MATERIALS,44(7),2522-2528.
MLA	Chen, Ailian[1],et al."Polystyrene-Core Silica-Shell Composite Abrasives: The Influence of Core Size on Oxide Chemical Mechanical Planarization".JOURNAL OF ELECTRONIC MATERIALS 44.7(2015):2522-2528.

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