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	Method for fabricating a hybrid optical integrated circuit employing SOI optical waveguide
	LEE, SANG HWAN; JOO, GWAN CHONG; HWANG, NAM; SONG, MIN KYU
	2001-11-13
著作权人	UNILOC 2017 LLC
专利号	US6316281
国家	美国
文献子类	授权发明
其他题名	Method for fabricating a hybrid optical integrated circuit employing SOI optical waveguide
英文摘要	The present invention relates to an optical integrated circuit; and, more particularly, to a method for preparing an improved hybrid optical integrated circuit which is capable of accommodating optical waveguides, optical devices, such as light emitting devices and light receiving devices, and optical fibers in an effective manner. The present invention has the advantages of minimizing horizontal misalignment error between the SOI waveguide rib area, the V-groove etch window and the alignment marks, decreasing the manufacturing cost by passively aligning the waveguides, the optical devices and the optical fibers on a single substrate. Also, the present invention has an effect of reducing fresnel reflection loss by providing the LPCVD silicon nitride layer capable of being used as an anti-reflection coating layer at both ends of the waveguide.
公开日期	2001-11-13
申请日期	1999-09-10
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/40136]
专题	半导体激光器专利数据库
作者单位	UNILOC 2017 LLC
推荐引用方式 GB/T 7714	LEE, SANG HWAN,JOO, GWAN CHONG,HWANG, NAM,et al. Method for fabricating a hybrid optical integrated circuit employing SOI optical waveguide. US6316281. 2001-11-13.

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