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	Method of forming a rotation-induced superlattice structure
	KAO, YUNG-CHUNG; LIU, HUNG-YU; SEABAUGH, ALAN C.; LUSCOMBE, JAMES H.
	1997-07-02
著作权人	TEXAS INSTRUMENTS INCORPORATED
专利号	EP0508463B1
国家	欧洲专利局
文献子类	授权发明
其他题名	Method of forming a rotation-induced superlattice structure
英文摘要	This invention describes any multi-deposition system, whereby directing elemental or molecular source fluxes across a substrate in an asymmetrical manner and rotating the substrate at low rotation speeds, a superlattice is formed having a composition of A(x-_x)B(1-(x-_x))/A(x+_x)B(1-(x+_x) where _x is a function of the nonuniform focusing of the elemental or molecular source fluxes A and B. More specifically, superlattices 18 are formed in the ternary and quaternary In(GaAl)As alloys on InP by molecular beam epitaxy without mechanical shuttering. The superlattice 18 is formed by nonuniformly directing the group III elements 22 and 24 onto the substrate 26 and rotating the substrate 26 across the beams. Periodic ordering is produced by rotation of the substrate 26 through a nonuniform distribution of source fluxes at the rotating substrate 26. The growth rate and substrate rotation rate together determine the superlattice period. Other devices, systems and methods are also disclosed.
公开日期	1997-07-02
申请日期	1992-04-10
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/39511]
专题	半导体激光器专利数据库
作者单位	TEXAS INSTRUMENTS INCORPORATED
推荐引用方式 GB/T 7714	KAO, YUNG-CHUNG,LIU, HUNG-YU,SEABAUGH, ALAN C.,et al. Method of forming a rotation-induced superlattice structure. EP0508463B1. 1997-07-02.

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