Method for generating a strip waveguide
HEINEN, JOCHEN
1989-04-04
著作权人SIEMENS AKTIENGESELLSCHAFT, A GERMAN CORP
专利号US4818722
国家美国
文献子类授权发明
其他题名Method for generating a strip waveguide
英文摘要A method for generating a strip laser in a buried hetero-structure composed of layers, wherein a raised strip is etched out of the layer structure and the strip is laterally etched with an erosion melt. The lateral edges of the laser active layer are protected by leaving them covered with a portion of the layer dissolved out by the erosion melt. The deposits thus remaining are used to initiate the generation of an epitaxial layer which extends laterally from the laser-active layer.
公开日期1989-04-04
申请日期1987-05-26
状态失效
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/39213]  
专题半导体激光器专利数据库
作者单位SIEMENS AKTIENGESELLSCHAFT, A GERMAN CORP
推荐引用方式
GB/T 7714
HEINEN, JOCHEN. Method for generating a strip waveguide. US4818722. 1989-04-04.
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