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	Methods for photo-excitation of precursors in epitaxial processes using a rotary scanning unit
	MOFFATT, STEPHEN
	2016-11-22
著作权人	APPLIED MATERIALS, INC.
专利号	US9499909
国家	美国
文献子类	授权发明
其他题名	Methods for photo-excitation of precursors in epitaxial processes using a rotary scanning unit
英文摘要	Embodiments of the invention provide a method and apparatus for depositing a layer on a substrate. In one embodiment, the method includes exposing a surface of the substrate disposed within a processing chamber to a fluid precursor, directing an electromagnetic radiation generated from a radiation source to a light scanning unit such that the electromagnetic radiation is deflected and scanned across the surface of the substrate upon which a material layer is to be formed, and initiating a deposition process with the electromagnetic radiation having a wavelength selected for photolytic dissociation of the fluid precursor to deposit the material layer onto the surface of the substrate. The radiation source may comprise a laser source, a bright light emitting diode (LED) source, or a thermal source. In one example, the radiation source is a fiber laser producing output in the ultraviolet (UV) wavelength range.
公开日期	2016-11-22
申请日期	2014-02-21
状态	授权
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/38643]
专题	半导体激光器专利数据库
作者单位	APPLIED MATERIALS, INC.
推荐引用方式 GB/T 7714	MOFFATT, STEPHEN. Methods for photo-excitation of precursors in epitaxial processes using a rotary scanning unit. US9499909. 2016-11-22.

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