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	Micro benchtop optics by bulk silicon micromachining
	LEE, ABRAHAM P.; POCHA, MICHAEL D.; MCCONAGHY, CHARLES F.; DERI, ROBERT J.
	2000-06-06
著作权人	LAWRENCE LIVERMORE NATIONAL SECURITY LLC
专利号	US6071426
国家	美国
文献子类	授权发明
其他题名	Micro benchtop optics by bulk silicon micromachining
英文摘要	Micromachining of bulk silicon utilizing the parallel etching characteristics of bulk silicon and integrating the parallel etch planes of silicon with silicon wafer bonding and impurity doping, enables the fabrication of on-chip optics with in situ aligned etched grooves for optical fibers, micro-lenses, photodiodes, and laser diodes. Other optical components that can be microfabricated and integrated include semi-transparent beam splitters, micro-optical scanners, pinholes, optical gratings, micro-optical filters, etc. Micromachining of bulk silicon utilizing the parallel etching characteristics thereof can be utilized to develop miniaturization of bio-instrumentation such as wavelength monitoring by fluorescence spectrometers, and other miniaturized optical systems such as Fabry-Perot interferometry for filtering of wavelengths, tunable cavity lasers, micro-holography modules, and wavelength splitters for optical communication systems.
公开日期	2000-06-06
申请日期	1997-12-08
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/36453]
专题	半导体激光器专利数据库
作者单位	LAWRENCE LIVERMORE NATIONAL SECURITY LLC
推荐引用方式 GB/T 7714	LEE, ABRAHAM P.,POCHA, MICHAEL D.,MCCONAGHY, CHARLES F.,et al. Micro benchtop optics by bulk silicon micromachining. US6071426. 2000-06-06.

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