Integrated variable focal length lens and its applications
ZDEBLICK, MARK
1991-12-24
著作权人STANFORD UNIVERSITY
专利号US5074629
国家美国
文献子类授权发明
其他题名Integrated variable focal length lens and its applications
英文摘要A variable focal length lens integrated onto a silicon wafer. A light transmitting material such as gas or liquid is entrapped in a cavity in the wafer. The cavity has a flexible, light transmitting wall. The wall provides one surface of the lens. When the material inside the cavity is heated or cooled, the wall flexes and the focal length of the lens changes. The lens is suitable for use in temperature and pressure sensors, fiber optic communication networks, optical computers, and other applications.
公开日期1991-12-24
申请日期1990-06-27
状态失效
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/35987]  
专题半导体激光器专利数据库
作者单位STANFORD UNIVERSITY
推荐引用方式
GB/T 7714
ZDEBLICK, MARK. Integrated variable focal length lens and its applications. US5074629. 1991-12-24.
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