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	Substrate emitting vertical-cavity surface-emitting laser
	SIRBU, ALEXEI; IAKOVLEV, VLADIMIR; BERK, YURI; MENTOVICH, ELAD
	2019-10-29
著作权人	MELLANOX TECHNOLOGIES, LTD.
专利号	US10461507
国家	美国
文献子类	授权发明
其他题名	Substrate emitting vertical-cavity surface-emitting laser
英文摘要	A vertical-cavity surface-emitting laser (VCSEL), substrate emitting VCSEL, and multi-beam emitting device and corresponding manufacturing processes are provided. An example VCSEL comprises a substrate having a first surface and a second surface; an output coupling mirror disposed on the second surface of the substrate; a high reflectivity mirror; and an active cavity material structure disposed between the output coupling mirror and the high reflectivity mirror. The active cavity material structure comprises a first current-spreading layer, a second current-spreading layer, an active region disposed between the first current-spreading layer and the second current-spreading layer, and a tunnel junction overgrown by the second current spreading layer, wherein the tunnel junction is disposed adjacent the active region. The VCSEL is configured to emit radiation outward through the first surface of the substrate.
公开日期	2019-10-29
申请日期	2018-04-04
状态	授权
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/32157]
专题	半导体激光器专利数据库
作者单位	MELLANOX TECHNOLOGIES, LTD.
推荐引用方式 GB/T 7714	SIRBU, ALEXEI,IAKOVLEV, VLADIMIR,BERK, YURI,et al. Substrate emitting vertical-cavity surface-emitting laser. US10461507. 2019-10-29.

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