| Study of Deposition of Aluminum Nitride Thin Films by Hollow Cathode Electron Beam Vapor Deposition Method | |
| Mu, Zongxin; Mu, Xiaodong; Wang, Chun; Dong, Chuang | |
| 2010 | |
| 会议名称 | 7th Pacific Rim International Conference on Advanced Materials and Processing |
| 会议日期 | 2010-08-02 |
| 会议地点 | Cairns, AUSTRALIA |
| 关键词 | Thin film deposition aluminum nitride |
| 页码 | 1708-+ |
| 会议录 | 7th Pacific Rim International Conference on Advanced Materials and Processing
 |
| URL标识 | 查看原文 |
| 内容类型 | 会议论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/5270203 |
| 专题 | 大连理工大学 |
| 作者单位 | Dalian Univ Technol, Minist Educ, Sch Phys & Optoelect Technol, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian 116024, Peoples R China. |
| 推荐引用方式 GB/T 7714 | Mu, Zongxin,Mu, Xiaodong,Wang, Chun,et al. Study of Deposition of Aluminum Nitride Thin Films by Hollow Cathode Electron Beam Vapor Deposition Method[C]. 见:7th Pacific Rim International Conference on Advanced Materials and Processing. Cairns, AUSTRALIA. 2010-08-02. |
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