Structure and elastic recovery of Cr–C:H ﬁlms deposited by a reactive magnetron sputtering technique

CORC > 兰州化学物理研究所 > 中国科学院兰州化学物理研究所 > 固体润滑国家重点实验室

	Structure and elastic recovery of Cr–C:H ﬁlms deposited by a reactive magnetron sputtering technique
	Dai W(代伟) ; Wu GS(吴国松) ; Wang AY(汪爱英)
刊名	Applied Surface Science
	2010
卷号	257 页码:244-248
关键词	Cr–C:H Carbide Microstructure Elastic recovery Tribological behavior
ISSN号	0169-4332
通讯作者	汪爱英
中文摘要	Cr-containing hydrogenated amorphous carbon (Cr–C:H) ﬁlmswere deposited on silicon substrates usinga DC reactivemagnetron sputtering with Cr target in an Ar and C2H2 gasmixture. The composition, bondstructure,mechanical hardness and elastic recovery of the ﬁlmswere characterized using energy disper-sive X-ray spectroscopy, X-ray photoelectron spectroscopy, Raman spectroscopy and nano-indentation.The ﬁlm tribological behavior was also studied by a ball-on-disc tribo-tester. The results showed thatthe ﬁlms deposited at low C2H2 ﬂow rate (<10 sccm) presented a feature of composite Cr–C:H structure,which consisted of hard brittle chromium carbide phases and amorphous hydrocarbon phase, and thusled to the observed lowelastic recovery and poorwear resistance of the ﬁlms.However, the ﬁlmdepositedat high C2H2 ﬂow rate (40 sccm) was found to present a typical feature of polymer-like a-C:H structurecontaining a large amount of sp3 C–H bonds. As a result, the ﬁlm revealed a high elastic recovery, andthus exhibited an excellent wear resistance.
学科主题	材料科学与物理化学
收录类别	SCI
资助信息	the project of Science and Technology Department of Zhejiang Province (Grant Nos.: 2008C21055, 2009C11SA550048);Ningbo Municipal International Cooperation Foundation (Grant No: 2008B10046)
语种	英语
公开日期	2012-09-28
内容类型	期刊论文
源URL	[http://210.77.64.217/handle/362003/953]
专题	兰州化学物理研究所_固体润滑国家重点实验室
推荐引用方式 GB/T 7714	Dai W,Wu GS,Wang AY. Structure and elastic recovery of Cr–C:H ﬁlms deposited by a reactive magnetron sputtering technique[J]. Applied Surface Science,2010,257:244-248.
APA	代伟,吴国松,&汪爱英.(2010).Structure and elastic recovery of Cr–C:H ﬁlms deposited by a reactive magnetron sputtering technique.Applied Surface Science,257,244-248.
MLA	代伟,et al."Structure and elastic recovery of Cr–C:H ﬁlms deposited by a reactive magnetron sputtering technique".Applied Surface Science 257(2010):244-248.