Self-consistent kinetic modeling of electron distribution function in a low-pressure inductively coupled plasma

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	Self-consistent kinetic modeling of electron distribution function in a low-pressure inductively coupled plasma
	Yang Y; Wu HM(吴汉明)
刊名	Chinese Physics Letters
	1996
卷号	13 期号:6 页码:447-450
关键词	Discharge
ISSN号	0256-307X
通讯作者	Yang, Y (reprint author), CHINESE ACAD SCI,INST MECH,BEIJING 100080,PEOPLES R CHINA.
中文摘要	Based upon the spatially inhomogeneous Boltzmann equation in two-term approximation coupled with electromagnetic and fluid model analysis for the recently developed inductively coupled plasma sources, a self-consistent electron kinetic model is developed. The electron distribution function, spatial distributions of the electron density and ionization rate are calculated and discussed.
类目[WOS]	Physics, Multidisciplinary
研究领域[WOS]	Physics
关键词[WOS]	DISCHARGE
收录类别	SCI
语种	英语
WOS记录号	WOS:A1996VA45300013
公开日期	2009-08-03 ; 2010-08-20
内容类型	期刊论文
源URL	[http://dspace.imech.ac.cn/handle/311007/39118]
专题	力学研究所_力学所知识产出(1956-2008)
推荐引用方式 GB/T 7714	Yang Y,Wu HM. Self-consistent kinetic modeling of electron distribution function in a low-pressure inductively coupled plasma[J]. Chinese Physics Letters,1996,13(6):447-450.
APA	Yang Y,&吴汉明.(1996).Self-consistent kinetic modeling of electron distribution function in a low-pressure inductively coupled plasma.Chinese Physics Letters,13(6),447-450.
MLA	Yang Y,et al."Self-consistent kinetic modeling of electron distribution function in a low-pressure inductively coupled plasma".Chinese Physics Letters 13.6(1996):447-450.