Self-consistent kinetic modeling of low-pressure inductively coupled radio-frequency discharges

CORC > 力学研究所 > 中国科学院力学研究所 > 力学所知识产出(1956-2008)

	Self-consistent kinetic modeling of low-pressure inductively coupled radio-frequency discharges
	Yang Y; Wu HM(吴汉明)
刊名	Journal of Applied Physics
	1996
卷号	80 期号:7 页码:3699-3704
关键词	Electron-Distribution Function Rf Discharge Glow-Discharge Plasma Sources
ISSN号	0021-8979
中文摘要	An efficient method for solving the spatially inhomogeneous Boltzmann equation in a two-term approximation for low-pressure inductively coupled plasmas has been developed. The electron distribution function (EDF), a function of total electron energy and two spatial coordinates, is found self-consistently with the static space-charge potential which is computed from a 2D fluid model, and the rf electric field profile which is calculated from the Maxwell equations. The EDF and the spatial distributions of the electron density, potential, temperature, ionization rate, and the inductive electric field are calculated and discussed. (C) 1996 American Institute of Physics.
类目[WOS]	Physics, Applied
研究领域[WOS]	Physics
关键词[WOS]	ELECTRON-DISTRIBUTION FUNCTION ; RF DISCHARGE ; GLOW-DISCHARGE ; PLASMA SOURCES
收录类别	SCI
语种	英语
WOS记录号	WOS:A1996VL80100013
公开日期	2009-08-03 ; 2010-08-20
内容类型	期刊论文
源URL	[http://dspace.imech.ac.cn/handle/311007/39102]
专题	力学研究所_力学所知识产出(1956-2008)
推荐引用方式 GB/T 7714	Yang Y,Wu HM. Self-consistent kinetic modeling of low-pressure inductively coupled radio-frequency discharges[J]. Journal of Applied Physics,1996,80(7):3699-3704.
APA	Yang Y,&吴汉明.(1996).Self-consistent kinetic modeling of low-pressure inductively coupled radio-frequency discharges.Journal of Applied Physics,80(7),3699-3704.
MLA	Yang Y,et al."Self-consistent kinetic modeling of low-pressure inductively coupled radio-frequency discharges".Journal of Applied Physics 80.7(1996):3699-3704.