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	Qualitative Identification of the Static Pull-In and Fundamental Frequency of One-Electrode MEMS Resonators
	Han, Jianxin; Li, Lei; Jin, Gang; Ma, Wenkui; Feng, Jingjing; Jia, Haili; Chang, Dongmei
刊名	MICROMACHINES
	2018
卷号	9期号:12
关键词	MEMS resonator one-electrode static pull-in fundamental frequency
DOI	10.3390/mi9120614
URL标识	查看原文
公开日期	[db:dc_date_available]
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/4580098
专题	山东大学
作者单位	Tianjin Univ Technol & Educ, Sch Mech Engn, Tianjin Key Lab High Speed Cutting & Precis Machi, T
推荐引用方式 GB/T 7714	Han, Jianxin,Li, Lei,Jin, Gang,et al. Qualitative Identification of the Static Pull-In and Fundamental Frequency of One-Electrode MEMS Resonators[J]. MICROMACHINES,2018,9(12).
APA	Han, Jianxin.,Li, Lei.,Jin, Gang.,Ma, Wenkui.,Feng, Jingjing.,...&Chang, Dongmei.(2018).Qualitative Identification of the Static Pull-In and Fundamental Frequency of One-Electrode MEMS Resonators.MICROMACHINES,9(12).
MLA	Han, Jianxin,et al."Qualitative Identification of the Static Pull-In and Fundamental Frequency of One-Electrode MEMS Resonators".MICROMACHINES 9.12(2018).

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